ICS 31.030 L 40/49 团体 标准 T/CASAS 020—2021 微纳米金属烧结体热导率试验方法 闪光法 Test method for thermal conductivity of micro -nano sintered compact: laser flash method 2021-11-01发布 2021-12-01实施 第三代半导体产业技术创新战略联盟 发布 全国团体标准信息平台 T/CASAS 020—2021 I 目 次 前 言 ................................ ................................ ................................ ................................ ................................ III 引 言 ................................ ................................ ................................ ................................ ................................ . V 1 范围 ................................ ................................ ................................ ................................ ................................ 1 2 规范性引用文件 ................................ ................................ ................................ ................................ .............. 1 3 术语和定义 ................................ ................................ ................................ ................................ ...................... 1 4 方法原理 ................................ ................................ ................................ ................................ .......................... 2 4.1 热导率值的计算 ................................ ................................ ................................ ................................ ..... 2 4.2 热扩散系统的测量 ................................ ................................ ................................ ................................ .. 2 4.3 比热容的测量 ................................ ................................ ................................ ................................ ......... 3 4.4 体积密度的测量 ................................ ................................ ................................ ................................ ..... 3 5 仪器及设备 ................................ ................................ ................................ ................................ ...................... 3 5.1 样品制备模具 ................................ ................................ ................................ ................................ ......... 3 5.2 热扩撒系数测试仪 ................................ ................................ ................................ ................................ .. 4 5.3 尺寸测量仪器 ................................ ................................ ................................ ................................ ......... 4 5.4 差式扫描量热仪 ................................ ................................ ................................ ................................ ..... 4 5.5 密度天平 ................................ ................................ ................................ ................................ ................. 5 6 干扰 ................................ ................................ ................................ ................................ ................................ 5 7 试样准备 ................................ ................................ ................................ ................................ .......................... 5 7.1 样品尺寸 ................................ ................................ ................................ ................................ ................. 5 7.2 样品准备 ................................ ................................ ................................ ................................ ................. 6 8 测试条件 ................................ ................................ ................................ ................................ .......................... 6 9 测试步骤 ................................ ................................ ................................ ................................ .......................... 6 9.1 总则 ................................ ................................ ................................ .............